Free CMMS and OEE Tracker for Semiconductor Manufacturing
Track tool downtime, interlock trips and PM requals across your fab and cleanroom for free, then graduate to automatic capture once micro-stops run faster than a person can log them.
The short answer
- Start free: log a fab tool or cleanroom shift in the OEE tracker in about 2 minutes, no account and no install.
- See the real losses: a downtime Pareto ranks interlock trips, chamber alarms, wafer-handling faults, PM downtime and metrology holds automatically.
- Honest limit: it is manual shift logging on one tool set and one browser, ideal for a first baseline, not for second-long stops on high-throughput equipment.
- Graduate when it hurts: once micro-stops outrun manual logging, book a Fabrico demo for automatic PLC capture and computer-vision true-cause with video evidence.
In a wafer fab, the losses that hurt most are the ones nobody writes down. An interlock trip on a stepper, a chamber alarm on an etcher, a wafer-handling fault at the load port, a metrology hold while SPC clears, each stop might last under a minute, but on high-throughput tools running lots around the clock, a handful per shift quietly erodes tool availability and pushes WIP out late. At semiconductor tolerances, a stop that ends in a scrapped wafer or a requal run costs far more than the minute it took.
The free OEE tracker gives a fab team a real place to start. Log a tool or cleanroom shift in about two minutes, tag each downtime reason, and let the Pareto show whether interlock trips, PM downtime, wafer-handling faults or metrology holds are actually your biggest loss this week. It runs entirely in the browser, so there is no account, no install and no data leaving the device, and you can put a number on those stops with the cost of downtime breakdown.
Manual logging is honest work for a first baseline on one tool set. It stops scaling the moment stops last seconds and stack up faster than a person in a cleanroom suit can tab them into a form, which is exactly where automatic capture starts to pay for itself. That is the gap a platform like Fabrico is built for, and it is the tradeoff to weigh in how to choose OEE and CMMS software.
What you get, free
Shift logging in about 2 minutes
Log run time, wafers or lots out, scrap and downtime reasons for a litho, etch, deposition, CMP or test tool straight from the browser. No install and no account needed to start.
Instant OEE with the A/P/Q breakdown
See availability, performance and quality the moment you save a shift, so you know whether a rough run was tool downtime, a slow lot, or a scrap and yield problem at final test.
Downtime Pareto by reason
Tag each stop (interlock trip, chamber alarm, wafer-handling fault, PM or requal, metrology hold, changeover) and the tracker ranks your biggest losses automatically, no pivot table required.
Per-tool breakdown and shareable scorecard
Compare each tool against the widely used 85% world-class OEE benchmark, break OEE down per tool, and generate a printable PDF scorecard to share with your shift or process owner.
Work order board and PM schedule
Raise a work order the moment you spot a loss and keep a preventive-maintenance schedule for chamber wet-cleans, kit swaps, pump and filter changes and requal runs, all on the same free board.
Asset register, export and browser-local backup
Keep a register of your fab tools plus people and roles, export everything to CSV or JSON, and back up or restore your data anytime. It all stays in your browser, nothing is uploaded.
Log one shift and the free tracker shows your OEE, your loss Pareto and how you compare to world-class. Add work orders and preventive-maintenance reminders in the same place.
Where free stops, and Fabrico begins
The free tracker is built for getting started fast and for one plant on one device. When a site gets serious about its losses, the manual steps start to cost more than they save. This is exactly where Fabrico takes over.
| Capability | Free OEE Lab tracker | Fabrico |
|---|---|---|
| Data capture | Log each fab tool or cleanroom shift by hand in about 2 minutes; data stays in your browser. | Captures OEE automatically off your tool PLCs, so there is no manual entry to keep up with. |
| Micro-stop cause | You investigate interlock trips, chamber alarms and wafer-handling faults yourself and note the reason. | Computer vision identifies the true cause of each micro-stop with video evidence, down to the tool and the event. |
| Loss-to-fix loop | You spot the loss on the Pareto, then raise the work order yourself on the board. | A detected loss, like a repeating interlock trip, becomes an auto-routed work order the moment it happens. |
| Scope and multi-site | One tool set on one device and browser, best for a single line or bay. | The closed PLC-to-work-order loop runs plant-wide, across litho, etch, deposition, CMP and test, and across multiple fabs. |
| Integrations | Standalone; run it on its own and export data when you need it in MES or your yield system. | Connects straight to your tool PLCs so OEE capture feeds the work-order loop directly. |
| Access and roles | Local people and roles stored on that one device, no account. | Role-based access across the fab with a full audit trail behind every change. |
| Data residency | Your data never leaves the browser on that device, so nothing is hosted anywhere by default. | EU-built with EU data residency, so fab data stays on infrastructure inside the EU. |
| Reporting | Instant OEE, A/P/Q, a downtime Pareto and CSV/JSON export you run yourself. | Live OEE from automatic PLC capture, with computer-vision true-cause behind every downtime line. |
| Audit support | Your own exported records, useful evidence but assembled by hand for an ISO 9001 or customer qualification audit. | Automatic capture with an audit trail that supports audit-readiness, backed by ISO 27001, 20000-1 and 9001 certification. |
Frequently asked questions
How do I track second-long micro-stops on high-throughput semiconductor tools?
You cannot hand-log every sub-minute interlock trip or chamber alarm, and it is honest to admit that. Start with the free OEE tracker to record stops by category per shift, which shows where the time is going even without event-level detail. When interlock trips or wafer-handling faults become a top loss and lot rates make manual tallying unreliable, that is the signal to move to automatic capture. Fabrico reads OEE straight off the tool PLC and uses computer vision to name the true cause of each micro-stop with video evidence, so a nuisance alarm stops being a mystery line on the Pareto.
Is manual OEE logging realistic in a wafer fab, or do we need automatic capture?
Manual logging is realistic as a starting point on one tool set or one shift, and it is genuinely how many teams get their first trustworthy OEE number. It stops being realistic as a permanent method once stops last seconds and blur together across a running lot. The free tracker is built for that first phase: get a real baseline, see the Pareto, prove the case internally. Review the tradeoffs in how to choose OEE and CMMS software before you commit to a platform.
Does the free tracker fit cleanroom discipline and keep our data controlled?
Yes. It runs entirely in the browser with no account and no upload, so shift data stays on the device you log it on and nothing is sent to a server by default. Open it in a browser on a shop-floor PC or tablet near the cleanroom, log a shift in about two minutes at gown-out, and export or back up to CSV or JSON whenever you need a copy off the device.
Can the free tracker replace our CMMS for fab tool maintenance?
For a single tool set on one device, it covers a real work-order board, a preventive-maintenance schedule for wet-cleans, kit swaps and requals, and an asset register, with no account needed. For multi-fab visibility, automatic PLC capture with the closed loop to work orders, or an audit trail that supports audit-readiness, you would move to a full platform. Some teams run it as-is on one bay; others use it as the honest first step before evaluating a platform like Fabrico for the whole fab.
Does OEE and maintenance data help with ISO 9001 or customer qualification audits?
Traceable maintenance, downtime and process records support ISO 9001 reviews and the customer and automotive-electronics qualification audits (such as IATF 16949) common across the supply chain. Keeping structured records supports audit-readiness for those reviews rather than promising an audit outcome. Fabrico's automatic capture and audit trail, backed by its ISO 27001, 20000-1 and 9001 certification, supports audit-readiness.
When should we move from the free tracker to Fabrico?
Move when manual logging becomes the bottleneck instead of the fix: micro-stops happen too fast to hand-log, you need OEE across several tools or fabs, or you want a loss to trigger the fix without a person retyping it. Fabrico reads OEE straight off the PLC, uses computer vision to name the true cause of each micro-stop with video evidence, and turns a detected loss into an auto-routed work order, plant-wide and EU-hosted. When you are there, book a Fabrico demo and test it against your own tools.
When free is not enough, Fabrico is the upgrade
The free tracker gets a fab its first honest OEE number and a real downtime Pareto, and plenty of single-tool operations run on it as-is. It runs out of road exactly where semiconductor losses live: sub-minute interlock trips, chamber alarms and wafer-handling faults happening too fast and too often to log by hand, on one tool set with no view across the rest of the fab. Fabrico captures OEE automatically off your tool PLCs, uses computer vision to name the true cause of each micro-stop with video evidence, and auto-routes the resulting work order, plant-wide and across fabs, built and hosted in the EU with ISO 27001, 20000-1 and 9001 certification behind it. When manual logging becomes the bottleneck instead of the fix, book a Fabrico demo and see it run against your own tools.
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Free OEE tracker · Free manufacturing software · Free CMMS for electronics · Free downtime tracking software · What is OEE? · How to choose OEE and CMMS software